Read-out calibration of a SOI capacitive transducer using the pull-in voltage

Read-out calibration of a SOI capacitive transducer using the pull-in voltage

The pull-in voltage of a parallel plate electrostatic transducer is used to determine the amount of over-etching in fabricated devices. A detailed analysis of the capacitor behaviour over the full displacement range yields a model, which is used to describe the relation between over-etching and measured pull-in voltage. SEM photos confirm the over-etching measurement based on pull-in voltage. T...

Model Reduction for Pull-in Voltage Analysis of SOI MEMS based Capacitive Accelerometer

In general, MEMS accelerometers fabrication relies more on trial and error than on clear design principles. Since the trial and error basis fabrication and testing of a MEMS are extremely costly, comprehensive modeling and simulation can be valuable tool to evaluate different designs and perform parametric studies each MEMS design before actual fabrication. This paper presents work done for SOI...

Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage

This paper describes an electro-mechanical auto-calibration technique for use in capacitive MEMS accelerometers. Auto-calibration is achieved using the combined information derived from an initial measurement of the resonance frequency and the measurement of the pull-in voltages during device operation, with an estimation of process-induced variations in device dimensions from layout and deviat...

Accurate Determination of the Pull-in Voltage for MEMS Capacitive Microphone with Clamped Square Diaphragm

Accurate determination of the pull-in, or the collapse voltage is critical in the design process. In this paper an analytical method is presented that provides a more accurate determination of the pull-in voltage for MEMS capacitive devices with clamped square diaphragm. The method incorporates both the linearized modle of the electrostatic force and the nonlinear deflection model of a clamped ...

Differential read-out circuit for capacitive sensors